Contracted Services by FE-EPMA | JTL
We will conduct elemental analysis of small areas using a field emission electron probe microanalyzer (FE-EPMA) with high sensitivity on the submicron order.
Using FE-EPMA (Field Emission Scanning Electron Probe Microanalyzer), we conduct SEM imaging and elemental analysis using WDX (Wavelength Dispersive X-ray Spectroscopy). It features better quantitative accuracy than EDX elemental analysis (± a few hundred ppm to a few thousand ppm) and superior spatial resolution compared to general-purpose EPMA (sub-micron order). It can be used for cross-sectional analysis of thin films with thicknesses of a few hundred nm and for analyzing the diffusion state of trace elements at joint interfaces.
- Company：JAPAN TESTING LABORATORIES
- Price：Other
